Annealing Effects on Silica Based Optical Waveguides Fabricated by Electron Beam Irradiation
Ary Syahriar
Program Studi Teknik Elektro, Fakultas Sains dan Teknologi,
Universitas Al Azhar Indonesia, Jl. Sisingamangaraja, Jakarta 12110
E-mail: ary@uai.ac.id
Abstract – Defect in channel waveguide fabricated by e-beam irradiation of PECVD silica-on-silicon films are analyzed by characterizing the propagation constant change due to high temperature annealing. The changes of normalized compaction are also described and the theoretical prediction on the variation of normalized compaction with anneal temperature in isochronal annealing is also provided.
Keywords – optical communications, optical waveguides, directional coupler, straight waveguides, silica on silicon